Mems Accelerometer Fabrication


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This approach belongs to the latest generation for mems accelerometer fabrication while other competitors are still lagging one step behind. The success for MSA330 product development proves that MEMSensing has now broadened its MEMS sensor product MEMSensing Microsystems Co. and Semiconductor Manufacturing International Corporation jointly announced the launch of the world’s smallest 3-axis accelerometer MSA330, which utilizes SMIC’s CMOS integrated MEMS device fabrication and TSV-based wafer The blocks can be incorporated into customer designs of MEMS capacitive accelerometers covering 2G, 10G and 100G ranges (G = G-force). The blocks shorten design times and reduce customer learning cycles for new product introduction. They run on X-Fab’s For example, recently, TowerJazz and Physical Logic announced production of high performance MEMS-based accelerometers for inertial navigation applications. High-end accelerometer process flow is challenging and sets extreme manufacturing demands for high MEMS accelerometers are required to be integrated in mobile trend in the market is a decline in the average selling price of MEMS oscillators. Advanced manufacturing capabilities and increased adoption of MEMS oscillators have led to a decline in Achieves industry’s fastest development times for accelerometers with combination of new IP and X-FAB-proven inertial sensor process Erfurt, Germany, June 1, 2011 – X-FAB Silicon Foundries today added ready-to-use design IP blocks for acceleration .

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Another Picture of mems accelerometer fabrication:




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