Thermal Accelerometer

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Memsic Inc. (Andover, Mass.) has introduced what it claims is the world's first monolithic 3D accelerometer and the first to make use of wafer-level packaging. The MXC400xXC makes use of Memsic's patented thermal convection, heated gas method to detect The key to this breakthrough is MEMSIC's proprietary and patented thermal accelerometer technology, in which the MEMS sensor structure is etched directly into standard CMOS wafers, enabling the world's only CMOS monolithic solution. This technique uses SAN JUAN CAPISTRANO, Calif. - July 15, 2002 - A new Accelerometer Thermal Isolator (ATI) significantly extends the operating temperature range of Endevco's family of piezoelectric ISOTRON® accelerometers. The ATI enables these low-impedance output MEMSIC Inc. has introduced the MXC400xXC that the company describes as the world's first monolithic 3D accelerometer to this breakthrough is MEMSIC's proprietary and patented thermal accelerometer technology, in which the MEMS sensor structure is Since it is based on MEMSIC's proven thermal accelerometer technology, which has no moving internal structures, the MXC6226XC exhibits extremely high shock survivability (up to 50,000g). This is five times greater than the shock survivability of capacitive The key to this breakthrough is MEMSIC's proprietary and patented thermal accelerometer technology, in which the MEMS sensor structure is etched directly into standard CMOS wafers, enabling the world's only CMOS monolithic solution. This technique uses .

MEMSIC has unveiled the world’s smallest, completely-integrated MEMS two-axis digital accelerometer called the MXC6226XC. The MXC6226XC, which employs MEMSIC’s proprietary MEMS thermal accelerometer technology that has no moving components is Piezo-resistive, capacitive, force balance and thermal-mass accelerometers are the types that provide the best DC response. You would use these accelerometers in navigation and robotic applications. One disadvantage to this type of accelerometer is that it The Memsic 2125 from the Maker shed is a low cost, dual-axis thermal accelerometer capable of measuring tilt, acceleration, rotation, and vibration with a range of ±3 g. For integration into existing applications, the Memsic 2125 is electrically "Our MFA1100R Thermal Gas Flow Module uses the identical proprietary thermal MEMS technology used in our thermal accelerometer, of which we have shipped hundreds of millions of parts into a variety of applications, including the highly demanding automotive .

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